Specifications include, but are not limited to: A. Variable Pressure Secondary Electron Microscope (SEM) The SEM must include: a. 5-axis motorized stage, enabling the user to manipulate the X, Y, Z, Tilt and rotation. • Stage must allow for motorized motion of at least 100mm in X -axis, 50 mm in Y-axis, 50 mm in Z, 360-degree Rotation and Tilt from -10 to 90 degrees. b. Secondary Electron Detector (SE;standard) • The SE resolution in high vacuum mode must be at least 3 nm at 30kV and at least 10 nm at 3kV c. Variable Pressure mode capable of running up to a pressure of at least 300 Pascal. d. Non-water cooled turbo pump vacuum system e. Chamber size able to accommodate a specimen at least 200 mm diameter and 80 mm tall. f. Chamber Lighting for navigation camera/chamber scope g. Integrated chamber scope that monitors the inside of the specimen chamber. h. Backscattered Electron Detector (BSE;standard) - • The BSE must be either a 5-segment solid state detector or a 4-segment solid-state detector with an off-axis chip for shadow mode collection. resolution of the instrument while operating in variable pressure mode must be 4.0nm or better at 30kV i. In-chamber digital camera for navigation across the sample surface. • The image or tiled images needs to cover a minimum of the 100 x 100 mm, to allow navigation over the required stage motion. j. Operation/control wheel set for manipulating focus, stigmation, zoom. • Manual Stage control (Trackball or Joystick) k. SEM control computer • Capable of live scan EDS • High Performance PC upgrade as required for any quoted components, including the VPSecondary Electron Detector • Windows 10 or Windows 11 operating system l. Table for SEM control computer • 40” Minimum Worksurface capable of supporting 2 LCD Monitors, Control wheel set, stage controller, Keyboard and Mouse m. Two (2) LCD Flat Panel Displays • 24” or larger LCD Monitors with stands or mounts as necessary n. Pre-centered Cartridge Filaments (10 count) o. Spare Wehnelt cap assembly. p. Sample stub mounts for single and multiple (4 and 8) samples using a standard 3.2mm pin stubs q. North America Install Kit (if required for operation of SEM) r. All components necessary to operate the SEM and run a sample. B. SEM Control Software The SEM control software must include: a. Ability to collect a montage of SEM images and recombine them to create a stitched image with any of the 3 detectors, the secondary electron (SE), backscatter electron (BSE) and the Variable Pressure SE. b. Ability for feature analysis, such as measuring lengths, particles diameters, angles, areas, etc. c. Allow real-time multi-signal processing and display capabilities d. Support multiple live signals for the same field of view which can be mixed and displayed as one combined live image. e. One (1) additional software license for image analysis software for off-instrument data analysis C. EDS Option 1 - Energy Dispersive Spectroscopy
