BACKGROUND
NIST is developing measurement methodologies for detection and identification of very low concentration of nanoparticle contaminants at extremely low concentration regimes. More than 75% of particles on an integrated chip are from liquid contaminates that are introduced during the fabrication process. Currently, the main approaches for single particle (sub-20nm) counting are ICP-MS, and laser scattering. Industry is unable to measure/control baseline impurities below 1 PPT (parts per trillion, based on dissolved ions). The BIG concern is distinguishing the instrument noise from the actual particle signal. To address this measurement challenge, we also aim at understanding the factors that govern the surface deposition of such nanoparticles to develop methods for their controlled and predictable deposition. These factors include chemical interactions and physical shape of the nanofeatures on the surface of interest. In part of this effort, we will use fluorescence, Raman and dark-field optical microscopies that are powerful tools for detecting nanoparticles down to few nanometers in size. These optical methods tandem with other high-resolution and high-sensitivity surface analytical instrumentations will be used to develop novel methods for rapid particle impurity detection on a chip.
In this regard Materials Measurement Science Division (MMSD) of NIST is planning to acquire a super resolution optical microscope with unique capabilities to meet the challenges of this project. MMSD has core expertise in multiscale materials characterization, atomic and nanoscale metrology to address national priorities and support critical and emerging technologies.
For reproducible and reliable detection of single particles as well as faint nanoscale emitters on a surface, a great deal of improved sensitivity and speed is needed to detect their fluorescence, and Raman scattering emissions. As such the platform for optical microscopy must have multiple functionalities that could be used in parallel or tandem. Firstly, it must be achromatic (no refractive optics) to provide a large spectral range from ultraviolet (UV) to near infrared (NIR). It must have the optics and detection systems capable of delivering high sensitivity, and high speed that are absolutely essential for detection and collection of light from nanoscale emitters with low quantum efficiencies. It must also be equipped with appropriate monochromatic laser excitation sources and data collection and processing tools. These capabilities should also allow rapid mapping of nanoparticles revealing their surface spatial distribution. This mapping should include maps of the different spectroscopies including Raman, fluorescence, and dark-field light scattering. Moreover, the software and hardware should allow stitching these maps to analyze a large size wafer, while offering high resolution spectra of the nanoparticles. Moreover, to boost the detection sensitivity, the microscope must be compatible for receiving a cryogenic stage for performing low temperature optical microscopy techniques listed earlier.
NIST is seeking information from sources that may be capable of providing a solution that will achieve the objectives described above, in addition to the following essential requirements:
System Requirements
• The instrument must be fully achromatic (no refractive optics) to provide a large spectral range, allowing it to work from 400 nm up to 1600 nm with 2 multichannel detectors (CCD and InGaAs) in a single spectrograph without any exchange of optics in the spectrograph. Furthermore, the system must be ready to allow NIR Raman microscopy.
• The instrument should include a flat field Czerny-Turner spectrograph, providing high quality slit image flat over at least 1 inch and then should integrate an air-cooled Open Electrode CCD detector 1 inch long (minimum 1024x256 pixels) sensitive from 200 to 1050nm or more.
• The gratings must be easily interchangeable with no limit to the number of gratings that can be added to the system. It is desired that the system offers medium and high spectral resolution by using 2 gratings with different grooves densities, mounted on the same turret.
• Must have Class 1 microscope enclosure for laser safety and ambient light control.
Lasers
• The system should allow to couple permanently up to 6 motorized lasers directly coupled to the microscope. Optical fiber coupling is not accepted. The system must include all the necessary optics, and mechanical adaptations for coupling the lasers, adjusting their power.
• 532nm high brightness laser should feature at least the following specifications:
Power >100mW, beam diameter<1mm, linewidth<1MHz, M²<1,2
• 633nm high brightness laser should feature at least the following specifications:
Power >17mW, beam diameter<1mm, linewidth<1MHz, M²<1,2
• 785nm high brightness laser should feature at least the following specifications:
Power >100mW, beam diameter<3mm, beam divergence<1mrad, M²<1,8
Filters
• For maximum sensitivity the filters must operate in injection/rejection mode: the same filter reflects the laser into the microscope and rejects the Rayleigh and laser scattered light that is reflected back into the spectrometer.
• The Rayleigh filter holder should be motorized and allow adjustment of the angle for each individual filter.
• As a standard, without the use of additional expensive ultra-low frequency (ULF) optics, the instrument must allow for 50 – 60 cm-1 low frequency acquisition for its Vis and NIR lasers.
• The instrument should offer access to very low wavenumber spectral regions below 50 cm-1 using Edge filters mounted on motorized kinematic mounts for quick wavelength change without any alignment.
Mapping
• The instrument should be equipped with a motorized X-Y computer-controlled stage with 10 nm minimum step-resolution and motorized Z-axis with step-resolution of 10 nm or better.
• The system must allow fast Raman imaging with an acquisition time of ≤5 ms per spectrum (without the use of an EMCCD) with any laser and objective configuration by allowing the CCD shutter to be open and collecting at discrete time intervals, while retaining confocality.
• The instrument should be equipped with two XY Piezo mirror scanners for laser rastering. The Piezo scanner should be able map with nanometric steps for more accurate and precise mapping than a motorized X-Y stage.
• The Piezo scanner should allow confocal mapping without stage movement, within the objective field of view. The Piezo scanner should be able map with nanometric steps over several tens of square micrometers without moving the sample enabling mapping in environmental cells such as a CryoAdvance-50 by Montana Instruments.
• The Piezo scanner should allow averaging an area within the objective to prevent photobleaching or laser damage of the materials.
• The Piezo scanner should be capable of generating a macro spot. The system should be able to combine XYZ motorized stage capability with a macro spot capability to map large dimensions samples within a short time. The macro spot dimensions should be adjustable to the type of sample, from a line to a square or a rectangle.
Microscope
• The instrument should include a true confocal microscope, which must be fully and permanently integrated in the main frame of the system and directly coupled to spectrometer to ensure highest spatial resolution, sensitivity and stability. Fiber coupling is not acceptable as this compromises ease of use. Motorized confocal pinhole should be continuously adjustable and computer controlled, to adjust the probed volume according to the type of sample.
Microscope options
• The system should include a rigidly attached free space microscope with high quality optics. It is desired that the objectives turret moves rather than the stage to allow big samples or cryostats to be used under the microscope such as a Closed Loop Montana Cryostat, CryoAdvance-50.
• Polarization, DIC and phase contrast visualization modes future extensions should be available (optional).
• The system should include a stage insert for one filter holder. Minimum requirement for the filers:
- filter holder, 47 mm diameter, closed version, bayonet cap
- 25 mm diameter, closed version, screw cap
• The system should include polarized white light and dark field in reflection and transmission illumination, and Koehler illumination system with abbe condenser and powerful LED source.
• The microscope should include 5x, 10x and 100x objectives and optical coupling from microscope to spectrometer maximized for best spatial resolution, that is for the 100x objective. Minimum requirement for the objectives:
- 5X visible, NA = 0.10, WD = 19.6 mm
- 10X visible, NA = 0.25, WD = 10.6 mm
- 100X visible, NA = 0.9, WD = 0.21 mm
• The microscope should include 100x oil immersion objective (NA = 1.25, WD = 0.15 mm or better)
• The microscope must be equipped with a high-definition USB color camera to visualize the sample under white light illumination and the laser spot simultaneously.
• The system must include an accessory for measuring horizontally.
Spectrograph
• It is required that the instrument has the capability for high spectral resolution as this is required to provide more precise band shape analysis, frequency position and separation of close peaks. For optimum spectral performance, the instrument should have a focal length of at least 600 mm and feature a spectral dispersion better than 0.35cm-1 per pixel (26 microns) for 633 nm excitation wavelength with 1800gr/mm grating.
o Spectrograph focal length must be 650mm or longer
o Spectral resolution <0,5cm-1 FWHM at 633nm
Detectors
• The spectrometer must have at least three detector ports to allow the system to be configured with 3 TE cooled multichannel detectors simultaneously. This system will be used for both Raman and PL measurements in the NIR. In addition. It is desired that the system can accept an additional single channel detector port for future upgrade.
• The instrument offered must provide a CCD chip of at least 25 mm in width and at least 1024x256 pixels. The complete chip (1024 pixels) must be used to acquire the spectral data, in both stationary and continuous scanning modes, without spectral distortion.
• To provide the highest sensitivity for rapid Raman measurements the CCD delivered with this system must provide a quantum efficiency (QE) that is at least 80% from 500nm to 800nm and have a peak QE of at least 95%.
• CCD should be deep cooled to at least -60°C, to provide low noise performance (dark current <0,002e-/pixel/sec). Detector linearity should be better than 99%.
Software capabilities
• Windows 10 based software.
• The instrument software must drive the mapping stage and allow the acquisition of hyperspectral images. Exact positioning of the sample and mapping area is required – therefore an image capture card and video camera should be used to visualize the sample and be coupled through the system software. The software must also allow the visualization and mathematical manipulation of hyperspectral images. It must be possible to generate images of band intensity, position and width.
• It is not acceptable to have 2 separate software for acquisition and data processing.
• Software should include mosaic capability to generate large area extended image of the sample, and it should permit low/high magnification video images to be simultaneously visualized to facilitate finding the region of interest in any sample.
• It is desired that a 3D topography map can be realized using focus-stacking imaging technology even on large areas, independently from the Raman/PL acquisition map.
• The system should allow morphological particle analysis based on video image and should allow automated localization of the particles for Raman/PL acquisition. It is preferred if each single particle can be mapped in order to clearly identify aggregates from individual particles.
• The system must include a spectral identification function software permitting the creation of spectra libraries and the search of spectra for identification. 2500 spectra or more must be included in the library, dedicated to different sample families.
• Multivariate analysis capability should be built-in and include PCA, MCR, HCA, DCA and PLS at least.
Future extensions
• The system should allow to be coupled to an AFM system for AFM/Raman co-localized imaging and TERS measurement.
• The microscope should include a 74x fully achromatic reflective objective (Schwarzschild Design) covering [200-2100nm] spectral range. It is preferred that the objective entrance pupil diameter doesn't exceed 4mm, NA=0.65, WD=1mm.
• Instrument should offer access to very low wavenumber spectral regions below or at 5 cm-1 by the use of high transmittance filters (no premonochromator is accepted)
• The system must accommodate a Liquid Nitrogen cooled InGaAs detector array with at least 512 pixels working from 800 nm to 1550 nm with a quantum efficiency of at least 80% between 1000 nm and 1500 nm.
HOW TO RESPOND TO THIS NOTICE
In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response: Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed in this notice as soon as possible, and preferably before the closing date and time of this notice. Please note that to be considered for award under any official solicitation, the entity must be registered and “active” in SAM at the time of solicitation response.
- Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company’s Unique Entity ID (UEI).
- Identify the equipment that your company sells that can meet the objectives addressed in the BACKGROUND section of this notice. For each product recommended to meet the Government’s requirement, provide the following:
- Manufacturer name
- Model number
- Technical specifications
- If your company is not the manufacturer, provide information on your company’s status as an authorized reseller of the product(s)
- Describe performance capabilities of the product(s) your company recommends to meet the Government’s requirements. Additionally, if there are other features or functions that you believe would assist NIST in meeting its objectives described above, please discuss in your response.
- Discuss whether the equipment that your company sells and which you describe in your response to this notice may be customized to specifications and indicate any limits to customization.
- Identify any aspects of the NIST market research notice, including instructions, and draft minimum specifications in the BACKGROUND section you cannot meet and state why. Please offer suggestions for how the market research notice and draft minimum specifications could be made more competitive.
- State whether the proposed equipment is manufactured in the United States and, if not, state the name of the country where the equipment is manufactured.
- Identify any plans/possibilities for changes in manufacturing location of the aforementioned equipment and provide relevant details, including timeline.
- For the NAICS code listed in this notice:
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- Indicate whether your company is (a) a small business or (b) other than small business. See the Table of Small Business Size Standards and the associated .pdf download file for small business size standards and additional information.
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- If you believe the NAICS code listed in this notice is not the best NAICS code for the type of product addressed in this notice, identify an alternative NAICS code that you believe would be more appropriate for the planned procurement.
- Describe services that are available with the purchase of the aforementioned equipment from your company such as installation, training, and equipment maintenance.
- Describe standard terms and conditions of sale offered by your company for the recommended equipment such as: delivery time after your company accepts the order; FOB shipping terms; manufacturer warranty (including details regarding nature and duration); if available, description(s) of available extended warranty; equipment setup and test; operator and service instruction manual(s); cleanup after installation; and if applicable, other offered services. Provide a copy of manufacturer standard terms and conditions that typically relate to the sale of the specified equipment, if available.
- State whether your company offers facility renovation services related to installation of the recommended equipment at its delivery destination, if required per the NIST-identified minimum specifications, and provide description of said services. Indicate if your company performs the facility renovation services or typically subcontracts the work to another company. Indicate if your company would be interested in inspecting the intended installation site during the market research phase.
- State published price, discount, or rebate arrangements for recommended equipment and/or provide link to access company’s published prices for equipment and services.
- If the recommended equipment and related services are available for purchase on any existing Federal Supply Schedule contract(s) or other contracts against which NIST may be able to place orders, identify the contract number(s) and other relevant information.
- Identify any customers in the public or private sectors to which you provided the recommended or similar equipment. Include customer(s) information: company name, phone number, point of contact, email address.
- Provide any other information that you believe would be valuable for NIST to know as part of its market research for this requirement.
- State if you require NIST to provide additional information to improve your understanding of the government’s requirement and/or would like to meet with NIST representatives to discuss the requirement and the capabilities of the identified equipment.
QUESTIONS REGARDING THIS NOTICE
Questions regarding this notice may be submitted via email to the Primary Point of Contact and the Secondary Point of Contact listed in this notice. Questions should be submitted so that they are received 5 days prior to the response date. If the Contracting Officer determines that providing a written amendment to this notice to document question(s) received would benefit other potential respondents, the questions would be anonymized, and a written response to such question(s) would be provided via an amendment to this notice.
IMPORTANT NOTES
This notice is for market research purposes and should not be construed as a commitment by NIST to issue a solicitation or ultimately award a contract. There is no solicitation available at this time.
This notice does not obligate the Government to award a contract or otherwise pay for the information provided in response.
NIST reserves the right to use information provided by respondents for any purpose deemed necessary and legally appropriate.
Any organization responding to this notice should ensure that its response is complete and sufficiently detailed to allow the Government to determine the organization’s capability.
Respondents are advised that the Government is under no obligation to acknowledge receipt of the information received or provide feedback to respondents with respect to any information submitted.
After a review of the responses received, a synopsis and solicitation may be published on GSA’s eBuy or SAM.gov. However, responses to this notice will not be considered an adequate response to any such solicitation(s).
The responses shall not exceed 12 pages including all attachments, charts, etc.
Thank you for taking the time to submit a response to this request!
