University requires a high stylus profilometer that meets the following specifications: Vertical step height resolution and repeatability of 0.5 nm or better, with controllable stylus force range of 1 to 15 mg. Better resolution and force control is desirable. Proposer must specify the typical resolution without isolation table and with isolation table. Vertical measurement range of up to 1 mm, and lateral scan range up to 150 mm. Proposer must specify the maximum scan length without stitching and stitching error. Motorized stage with X-Y, theta, and leveling adjustments. Must be able to accommodate 150 mm diameter wafer and stitching into 3-D images. Proposer must specify stitching error. Readily user exchangeable styli with a variety of radii and included angles. Proposer must specify what styli are available. Must include an external computer with software for measurement, data extraction and model manipulation including: Step, stress, roughness, and bow/shape analysis; and Capability to save and export images and measurement data to non-proprietary formats.
